Ion energy-angle distribution
WebThe ion energy-angle distribution (IEAD) at the wall of a magnetized plasma is of fundamental importance for the determination of the material processes occurring at the … Web5 ION ENERGY DISTRIBUTION FUNCTION energies. Of course, changing the pressure results in a change in the discharge characteristics which may alter the shape and …
Ion energy-angle distribution
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Web15 apr. 2015 · The U.S. Department of Energy's Office of Scientific and Technical Information Ion energy-angle distribution functions at the plasma-material interface in oblique magnetic fields (Journal Article) OSTI.GOV skip to main content Sign In Create Account Show searchShow menu U.S. Department of EnergyOffice of Scientific and … Webanalyze and characterize the shape of the measured Negative-Ion Energy Distribution Function (NIEDF). It strongly differs from the NIEDF of the ions emitted by the sample because of the limited acceptance angle of the mass spectrometer, so a model has been developed previously to interpret the experimental results [20].
Webwhere α depends on the mass ratio (i.e., M target /M ion) and angle of impact, but usually has values of 0.2–0.4 in sputtering. This equation only applies when the E ion is below 1 … WebN2 - The ion energy-angle distribution (IEAD) at the wall of a magnetized plasma is of fundamental importance for the determination of the material processes occurring at the plasma-material interface, comprising secondary emissions and material sputtering.
Web15 apr. 2015 · The U.S. Department of Energy's Office of Scientific and Technical Information Ion energy-angle distribution functions at the plasma-material interface in … Web2 nov. 2015 · Ion angle distribution measurement with a planar retarding field analyzer; Review of Scientific Instruments 86, 113501 ... Ion energy distributions, as a function of ion angle, with resolution as low as 3° can be measured. Acknowledgments. This research work is supported by the Irish Research Council. REFERENCES.
Web13 apr. 2024 · We report results for XUV-IR two-photon ionization of Ar, Ne, NO, and O2, where an XUV attosecond pulse train is superimposed with a synchronized IR pulse, obtained at the ATTOLab laser facility using electron–ion coincidence 3D momentum spectroscopy. Temporally resolved photoelectron angular distributions providing angle …
Web8 apr. 2024 · Background The Jagiellonian Positron Emission Tomograph is the 3-layer prototype of the first scanner based on plastic scintillators, consisting of 192 half-metre … highway 413 projecthttp://srim.org/SRIM/SRIM%2008.pdf small space needleWebIon Energy Distribution as a function of Angle Important parameter for anisotropic etching • Angular ions travel straight through the spherical fields • Multiple detectors located at … small space multi function furnitureWebwith respect to the plasma potential. The negative ions formed on the surface are accelerated by the sheath in front of the sample and self-extracted on the other side of the plasma towards a mass spectrometer. Negative ions are detected according to their energy and mass and Negative-Ion Energy Distribution Function (NIEDF) is measured. highway 416 ontarioWebIon energy and angular ion distributions play a critical role in plasma assiste d etching and conformal deposition processes. Ion impact at wider angles may be required for better … small space natural gas heatersWeb18 sep. 2024 · We investigate the energy and angular distributions of ions reaching the electrodes in low-pressure, capacitively coupled oxygen radio-frequency discharges. … small space nursery ideasWebThe possibilities to control ion energy distribution functions (IEDFs) and ion angle distribution functions (IADFs) on electrodes in singleand dualfrequency capacitively coupled plasma (CCP) sources are investigated by means of particle-in-cell/Monte Carlo (PIC/MCC) simulations. It is shown that the IEDFs can be controlled by the driven … highway 413 impacts