WebAmorphous ferromagnetic materials with variable composition are promising candidates for application in rapidly-growing technological fields, such as spintronics. However, the significant downside of current state-of-the-art materials is a conductivity mismatch between the injector and the semiconductor, whi WebJul 24, 2024 · We developed a novel process for the atomic layer deposition (ALD) of SiC x N y films using a Si 2 Cl 6 and a CH 3 NH 2 plasma. Under self-limiting growth conditions, this ALD process led to SiC x N y films with up to 9 atomic percent carbon with a conformality >95% in 5:1 aspect ratio nanostructures. The surface reactions during ALD, and in …
Display panel and method for fabricating the same - Eureka
WebThe effect of a-SiCxNy:H encapsulation layers, which are prepared using the very-high-frequency plasma-enhanced chemical vapor deposition (VHF-PECVD) technique with … WebAmorphous hydrogenated silicon carbonitride films were synthesized on Si(100), Ge(111), and fused silica substrates using the inductively coupled plasma chemical vapor deposition technique. 1,1,3,3-tetramethyldisilazane (TMDSN) was used as a single-source precursor. The effect of the precursor’s pressure in the initial gas mixture, the substrate … canon eos settings
Atomic Layer Deposition of SiCxNy Using Si2Cl6 and CH3NH2 …
WebAmorphous ferromagnetic materials with variable composition are promising candidates for application in rapidly-growing technological fields, such as spintronics. However, the … WebSHIANG-TAI LIN 研究人員網路 瀏覽統計 Email 通知 RSS Feed 瀏覽統計 Email 通知 RSS Feed WebIn this work, SiC x N y-based resistive switching memory by using a single precursor for the back end of line (BEOL) integration has been investigated.SiC x N y films were deposited … flag red yellow green stripes